Ultra High Purity Pressure Gauge
SAFE-E / 40. 50. 60 Series (EP Level) - SAFE-E Series Electro-Polishing Grade
SAFE-B / 40. 50. 60 Series (BA Level) - SAFE-B Series Bright Annealing Grade
SAFE Series is designed for high-purity gas systems used in the semiconductor, electronics, medical, biotechnology, and pharmaceutical industries.
Product Specification
| Dimensions (outer diameter of the case) | 40mm, 50mm, 60mm |
|---|---|
| Style | Low mount, Center Back mount |
| Connection | 1/4" NPT 1/4" Metal Face Seal Fittings (Male/Female) - All Swivel Type 1/4" TUBE WELDING |
| Material | Bourdon : SUS316L (Surface treatment : BA, EP) Casing : SUS304 Movement : Stainless stee Cover : 聚碳酸酯 (PC) Plate : Aluminium (White) Point : Aluminum Alloy (Black) |
| Accuracy | Grade A ±1.0% F.S (Dial size: 50mm, 63mm) Grade B ±2.0% F.S (Dial size: 35mm, 50mm, 63mm) |
| Ambient temperature | -40℃ ~ +65℃ |
| Fluid temperature | Max. +100℃ |
| He Leakage rate | less than 1.0x10⁻¹⁰ Pa・m³/sec |
Cleaning/Manufacturing/Inspection Specifications
| Product | SAFE-E/SAFE-B |
|---|---|
| Cleanliness |
ASME B40.100 Cleanliness LEVEL 4) |
| Cleaging | Ultrasonic cleaning |
|
Assemble/adjust. correction |
Assemble : CLASS 10,000 C.R adjust. correction : CLASS 100 C.R |
| Leak test | Use Helium to test |
| Use no oil and water | Prohibition of oil and water treatment |
| Packing | Polyethylene material. Vacuum double-layer packaging |
Pressure Range List
| RANGE (psi/K) | RANGE (psi/K) | RANGE (psi/K) |
|---|---|---|
| 0-30psi/K | 0-3000psi/K | -30inHg-80psi/K |
| 0-60psi/K | 0-3500psi/K | -30inHg-90psi/K |
| 0-150psi/K | 0-3600psi/K | -30inHg-100psi/K |
| 0-200psi/K | 0-4000psi/K | -30inHg-150psi/K |
| 0-300psi/K | 0-5000psi/K | -30inHg-160psi/K |
| 0-600psi/K | 0-6000psi/K | -30inHg-200psi/K |
| 0-1000psi/K | -30inHg-15psi/K | -30inHg-300psi/K |
| 0-1500psi/K | -30inHg-30psi/K | -30inHg-500psi/K |
| 0-1600psi/K | -30inHg-40psi/K | -30inHg-600psi/K |
| 0-2000psi/K | -30inHg-60psi/K | -30inHg-1000psi/K |
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